Laser direct writing lithography technology and DMD maskless lithography technology. Laser direct write technology performs high-precision processing directly on the material surface using a laser beam , while DMD maskless technology uses a digital micromirror ray to project light beams for patterning, making its suitable for large- area lithography.
*Stepper Lithography
*Multi-Lens Automated Switching
*6-inch Exposure area
*0.8 micrometer clinical dimension
Our maskless UV projection photolithography system has high precision and high stability to realize complex patterns. Our flexible pattern designing is able to realize grayscale patterning thus achieving what-you-see-is-what-you-get.
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